MV MULTI-TRAP^® Application Questionnaire

There are currently several thousand MV MULTI-TRAP^® in use on a variety of processes. We make product and installation recommendations based on successful results from the field. This questionnaire was designed to provide us with the information we require to make the most effective recommendation for your specific application. Please be as detailed as possible.

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All information that you submit is considered confidential and will only be used to provide you with a recommendation.

First name Last name Title Company Address 1 Address 2 City State ZIP Telephone Fax E-mail System information   LPCVD MOCVD PECVD Plasma Etch APCVD Other (specify below)   Other system type System manufacturer and model Pumping package manufacturer and model   Process Information What process is being run? What process gases are used? What are the gas flow rates? (sccm, cc, l/m) What is the process pressure? Mechanical Information What is the diameter of the vacuum lines? What is the diameter of the exhaust lines?   Where is material accumulating in the system? Foreline Valve Exhaust Line Pump Please describe in detail which area causes the most problems: Complete   Back to Top