Products
MV Multi-Trap®
High Capacity, High Efficiency Vacuum Inlet or Exhaust Trap
- Protects oil-sealed vacuum pumps and dry vacuum pumps
- Remove corrosive and abrasive particles that can destroy your vacuum pump
- Processes such as LPCVD, PECVD, ALD, MOCVD, Metal Etch and HVPE.
- Modular design makes the unit easier to disassemble and clean
- Element replacement is fast and easy
- Water or refrigerant cooling option is available
The MV MULTI-TRAP® is a high capacity, high conductance vacuum inlet trap that protects your pump against corrosive chemicals and abrasive particles present in your vacuum system. It features a three stage effluent trapping system: the first stage knocks down heavy particles and condenses volatile solids and liquids on large surface areas; stages two and three contain two parallel banks of filter elements which can be customized to remove corrosive chemicals and fine particles. A water or refrigerant cooled accessory cools the first stage for even more effective condensation.
The MV MULTI-TRAP® is available in three different sizes, all of which accept the cooling coil module shown in this diagram. A version with a fully cooled baffle is also available.
The MULTI-TRAP® can be configured for many different installations, ranging from heavy particle applications to those producing condensable or organic vapors.
- Stage 1 knocks down heavy particles and some condensables
- Cooling coils remove more condensables and lowers the gas temperature
- Stage 2 cartridge elements make the first filtering pass
- Stage 3 elements remove finer particles
- Gas exits
Download an Acrobat® PDF file for more detailed information.
Click here for information on using multi-stage vacuum trapping to reduce manufacturing costs.
Boost Trap Performance with Cooling Coils MV Multi-Trap®
To enhance the condensation of high-temperature system effluents, cooling modules are available. The module replaces the bottom of some MULTI-TRAP® models. The gas stream is then directed to the cooling coils before it enters the second stage of filter elements.
The coils can be cooled with a refrigeration system or water.
For more information on Semiconductor Applications click here:
Semiconductor Applications
For more information on New Compound Semiconductor Applications click here:
New Compound Semiconductor Applications
For more information on Non-Semiconductor Applications click here:
Non-Semiconductor Applications
To receive more detailed information relating to your specific system requirements,
use this form.
| SPECIFICATIONS | |
| Construction | Stainless Steel |
| Seals | Buna N |
| Dimensions | Refer to drawing for specific models. |
| FILTER STAGES | ||||
| Model | Number of Filter Stages |
Filter Size | Number of Filters Per Stages |
Total Number of Filters |
| 355040 | 2 | 4.5" | 5 | 10 |
| 355050 | 2 | 4.5" | 5 | 10 |
| 355080 | 2 | 4.5" | 6 | 12 |
| 355100 | 2 | 4.5" | 6 | 12 |
| 355041 | 2 | 4.5" | 5 | 10 |
| 355051 | 2 | 4.5" | 5 | 10 |
| 355081 | 2 | 4.5" | 6 | 12 |
| 355101 | 2 | 4.5" | 6 | 12 |
| 355063 | 2 | 4.5" | 5 | 10 |
| 355082 | 2 | 4.5" | 5 | 10 |
| 355102 | 2 | 4.5" | 5 | 10 |
| 355160 | 2 | 4.5" | 8 | 16 |
| 355040S | 1 | 9.5" | 5 | 5 |
| 355050S | 1 | 9.5" | 5 | 5 |
| 355080S | 1 | 9.5" | 6 | 6 |
| 355100S | 1 | 9.5" | 6 | 6 |
| 355041S | 1 | 9.5" | 5 | 5 |
| 355051S | 1 | 9.5" | 5 | 5 |
| 355081S | 1 | 9.5" | 6 | 6 |
| 355101S | 1 | 9.5" | 6 | 6 |
| 355063S | 1 | 9.5" | 5 | 5 |
| 355082S | 1 | 9.5" | 5 | 5 |
| 355102S | 1 | 9.5" | 5 | 5 |
| 355160S | 1 | 9.5" | 8 | 8 |
| ORDERING INFORMATION | ||
| Model Number | Flange Type | |
| 10” diameter MULTI-TRAP ; 1.5” inlet/exhaust ports. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included). | 355040 | NW-40 |
| Same as 355040 except with 2” ports. | 355050 | NW-50 |
| Cooling option for 355040, 355050, 355063 | 355210 | N/A |
| 12” diameter MULTI-TRAP ; 3” inlet/exhaust ports. Requires 6 filter elements in stage 2 and 6 elements in stage 3 (elements not included).. | 355080 | ISO-80 |
| Same as 355080 except with 4” ports. | 355100 | ISO-100 |
| Cooling option for 355080, 355100, 355082, 355102 | 355212 | N/A |
| Same as 355040, except straight-thru configuration. (inlet on bottom) | 355041 | NW-40 |
| Same as 355050, except straight-thru configuration. (inlet on bottom) | 355051 | NW-50 |
| Same as 355080, except straight-thru configuration. (inlet on bottom) | 355081 | ISO-80 |
| Same as 355100, except straight-thru configuration. (inlet on bottom) | 355101 | ISO-100 |
| Same as 355050, except ISO-63 flanges. | 355063 | ISO-63 |
| 12” diameter MULTI-TRAP ; 3” inlet/exhaust ports and cooled filter assembly. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included). | 355082 | ISO-80 |
| 12” diameter MULTI-TRAP ; 4” inlet/exhaust ports and cooled filter assembly. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included). | 355102 | ISO-100 |
| Stacking modules for 10” diameter. | 355020 | |
| Stacking modules for 12” diameter. | 355022 | |
| 16” diameter MULTI-TRAP ; 6” inlet/exhaust ports. Requires 8 filter elements in stage 2 and 8 elements in stage 3 (elements not included). | 355160 | ISO-160 |
| Cooling option for 355160 | 355260 | N/A |
| MULTI-TRAP converted to hold one stage of 9.5” filter elements instead of 2 stages of 4.5”elements. | Add “S” to number | N/A |
| FILTER MEDIA | ||||
| Description* | Part Number 4.5" Size |
Part Number 9.5" Size |
||
| Copper gauze | 300905 | 300900 | ||
| Stainless | 300915 | 300910 | ||
| Molecular sieve | 300925 | 300920 | ||
| Sodasorb® | 300935 | 300930 | ||
| Activated charcoal | 300945 | 300940 | ||
| PolyPro 2m | 400925 | 400920 | ||
| PolyPro 5m | 400935 | 400930 | ||
| PolyPro 20m | 400945 | 400940 | ||
| * other filters available on request | ||||
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