High Capacity, High Efficiency Vacuum Inlet or Exhaust Trap
- Protects oil-sealed vacuum pumps and dry vacuum pumps
- Remove corrosive and abrasive particles that can destroy your vacuum pump
- Processes such as LPCVD, PECVD, ALD, MOCVD, Metal Etch and HVPE.
- Modular design makes the unit easier to disassemble and clean
- Element replacement is fast and easy
- Water or refrigerant cooling option is available
The MV MULTI-TRAP® is a high capacity, high conductance vacuum inlet trap that protects your pump against corrosive chemicals and abrasive particles present in your vacuum system. It features a three stage effluent trapping system: the first stage knocks down heavy particles and condenses volatile solids and liquids on large surface areas; stages two and three contain two parallel banks of filter elements which can be customized to remove corrosive chemicals and fine particles. A water or refrigerant cooled accessory cools the first stage for even more effective condensation.
The MV MULTI-TRAP® is available in three different sizes, all of which accept the cooling coil module shown in this diagram. A version with a fully cooled baffle is also available.
The MULTI-TRAP® can be configured for many different installations, ranging from heavy particle applications to those producing condensable or organic vapors.
- Stage 1 knocks down heavy particles and some condensables
- Cooling coils remove more condensables and lowers the gas temperature
- Stage 2 cartridge elements make the first filtering pass
- Stage 3 elements remove finer particles
- Gas exits
Download an Acrobat® PDF file for more detailed information.
Click here for information on using multi-stage vacuum trapping to reduce manufacturing costs.
Boost Trap Performance with Cooling Coils MV Multi-Trap®
To enhance the condensation of high-temperature system effluents, cooling modules are available. The module replaces the bottom of some MULTI-TRAP® models. The gas stream is then directed to the cooling coils before it enters the second stage of filter elements.
The coils can be cooled with a refrigeration system or water.
For more information on Semiconductor Applications click here:
For more information on New Compound Semiconductor Applications click here:
New Compound Semiconductor Applications
For more information on Non-Semiconductor Applications click here:
To receive more detailed information relating to your specific system requirements,
use this form.
|Dimensions||Refer to drawing for specific models.|
|Filter Size||Number of
Filters Per Stages
|Model Number||Flange Type|
|10 diameter MULTI-TRAP ; 1.5 inlet/exhaust ports. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included).||355040||NW-40|
|Same as 355040 except with 2 ports.||355050||NW-50|
|Cooling option for 355040, 355050, 355063||355210||N/A|
|12 diameter MULTI-TRAP ; 3 inlet/exhaust ports. Requires 6 filter elements in stage 2 and 6 elements in stage 3 (elements not included)..||355080||ISO-80|
|Same as 355080 except with 4 ports.||355100||ISO-100|
|Cooling option for 355080, 355100, 355082, 355102||355212||N/A|
|Same as 355040, except straight-thru configuration. (inlet on bottom)||355041||NW-40|
|Same as 355050, except straight-thru configuration. (inlet on bottom)||355051||NW-50|
|Same as 355080, except straight-thru configuration. (inlet on bottom)||355081||ISO-80|
|Same as 355100, except straight-thru configuration. (inlet on bottom)||355101||ISO-100|
|Same as 355050, except ISO-63 flanges.||355063||ISO-63|
|12 diameter MULTI-TRAP ; 3 inlet/exhaust ports and cooled filter assembly. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included).||355082||ISO-80|
|12 diameter MULTI-TRAP ; 4 inlet/exhaust ports and cooled filter assembly. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included).||355102||ISO-100|
|Stacking modules for 10 diameter.||355020|
|Stacking modules for 12 diameter.||355022|
|16 diameter MULTI-TRAP ; 6 inlet/exhaust ports. Requires 8 filter elements in stage 2 and 8 elements in stage 3 (elements not included).||355160||ISO-160|
|Cooling option for 355160||355260||N/A|
|MULTI-TRAP converted to hold one stage of 9.5 filter elements instead of 2 stages of 4.5elements.||Add S to number||N/A|
|* other filters available on request|
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