MV Multi-Trap®

High Capacity, High Efficiency Vacuum Inlet or Exhaust Trap

  • Protects oil-sealed vacuum pumps and dry vacuum pumps
  • Remove corrosive and abrasive particles that can destroy your vacuum pump
  • Processes such as LPCVD, PECVD, ALD, MOCVD, Metal Etch and HVPE.
  • Modular design makes the unit easier to disassemble and clean
  • Element replacement is fast and easy
  • Water or refrigerant cooling option is available

The MV MULTI-TRAP® is a high capacity, high conductance vacuum inlet trap that protects your pump against corrosive chemicals and abrasive particles present in your vacuum system. It features a three stage effluent trapping system: the first stage knocks down heavy particles and condenses volatile solids and liquids on large surface areas; stages two and three contain two parallel banks of filter elements which can be customized to remove corrosive chemicals and fine particles. A water or refrigerant cooled accessory cools the first stage for even more effective condensation.

The MV MULTI-TRAP® is available in three different sizes, all of which accept the cooling coil module shown in this diagram. A version with a fully cooled baffle is also available.

The MULTI-TRAP® can be configured for many different installations, ranging from heavy particle applications to those producing condensable or organic vapors.

  1. Stage 1 knocks down heavy particles and some condensables
  2. Cooling coils remove more condensables and lowers the gas temperature
  3. Stage 2 cartridge elements make the first filtering pass
  4. Stage 3 elements remove finer particles
  5. Gas exits

Boost Trap Performance with Cooling Coils MV Multi-Trap®

To enhance the condensation of high-temperature system effluents, cooling modules are available. The module replaces the bottom of some MULTI-TRAP® models. The gas stream is then directed to the cooling coils before it enters the second stage of filter elements.

The coils can be cooled with a refrigeration system or water.

For more information on Semiconductor Applications click here:
Semiconductor Applications
For more information on New Compound Semiconductor Applications click here:
New Compound Semiconductor Applications
For more information on Non-Semiconductor Applications click here:
Non-Semiconductor Applications
To receive more detailed information relating to your specific system requirements,
use this form.

SPECIFICATIONS
Construction Stainless Steel
Seals Buna N
Dimensions Refer to drawing for specific models.

 

INSTALLATION DRAWINGS
Click following links to see drawings:
MV Multi-Trap MODEL 355040 (NW-40)
MV Multi-Trap MODEL 355050 (NW-50)
MV Multi-Trap MODEL 355210
COOLING COIL ACCESSORY
MV Multi-Trap MODEL 355080 (ISO-80)
MV Multi-Trap MODEL 355100 (ISO-100)
MV Multi-Trap MODEL 355082 (ISO-80)
MV Multi-Trap MODEL 355102 (ISO-100)
MV Multi-Trap MODEL 355212
COOLING COIL ACCESSORY
MV Multi-Trap MODEL 350160 (ISO-160)
MV Multi-Trap MODEL 355160
MV Multi-Trap MODEL 355260
COOLING COIL ACCESSORY

 

FILTER STAGES
Model Number of
Filter Stages
Filter Size Number of
Filters Per Stages
Total Number
of Filters
355040 2 4.5″ 5 10
355050 2 4.5″ 5 10
355080 2 4.5″ 6 12
355100 2 4.5″ 6 12
355041 2 4.5″ 5 10
355051 2 4.5″ 5 10
355081 2 4.5″ 6 12
355101 2 4.5″ 6 12
355063 2 4.5″ 5 10
355082 2 4.5″ 5 10
355102 2 4.5″ 5 10
355160 2 4.5″ 8 16
355040S 1 9.5″ 5 5
355050S 1 9.5″ 5 5
355080S 1 9.5″ 6 6
355100S 1 9.5″ 6 6
355041S 1 9.5″ 5 5
355051S 1 9.5″ 5 5
355081S 1 9.5″ 6 6
355101S 1 9.5″ 6 6
355063S 1 9.5″ 5 5
355082S 1 9.5″ 5 5
355102S 1 9.5″ 5 5
355160S 1 9.5″ 8 8

 

ORDERING INFORMATION
Model Number Flange Type
10” diameter MULTI-TRAP ; 1.5” inlet/exhaust ports. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included). 355040 NW-40
Same as 355040 except with 2” ports. 355050 NW-50
Cooling option for 355040, 355050, 355063 355210 N/A
12” diameter MULTI-TRAP ; 3” inlet/exhaust ports. Requires 6 filter elements in stage 2 and 6 elements in stage 3 (elements not included).. 355080 ISO-80
Same as 355080 except with 4” ports. 355100 ISO-100
Cooling option for 355080, 355100, 355082, 355102 355212 N/A
Same as 355040, except straight-thru configuration. (inlet on bottom) 355041 NW-40
Same as 355050, except straight-thru configuration. (inlet on bottom) 355051 NW-50
Same as 355080, except straight-thru configuration. (inlet on bottom) 355081 ISO-80
Same as 355100, except straight-thru configuration. (inlet on bottom) 355101 ISO-100
Same as 355050, except ISO-63 flanges. 355063 ISO-63
12” diameter MULTI-TRAP ; 3” inlet/exhaust ports and cooled filter assembly. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included). 355082 ISO-80
12” diameter MULTI-TRAP ; 4” inlet/exhaust ports and cooled filter assembly. Requires 5 filter elements in stage 2 and 5 elements in stage 3 (elements not included). 355102 ISO-100
Stacking modules for 10” diameter. 355020
Stacking modules for 12” diameter. 355022
16” diameter MULTI-TRAP ; 6” inlet/exhaust ports. Requires 8 filter elements in stage 2 and 8 elements in stage 3 (elements not included). 355160 ISO-160
Cooling option for 355160 355260 N/A
MULTI-TRAP converted to hold one stage of 9.5” filter elements instead of 2 stages of 4.5”elements. Add “S” to number N/A

 

FILTER MEDIA
Description* Part Number
4.5″ Size
Part Number
9.5″ Size
Copper gauze 300905 300900
Stainless 300915 300910
Molecular sieve 300925 300920
Sodasorb® 300935 300930
Activated charcoal 300945 300940
PolyPro 2m 400925 400920
PolyPro 5m 400935 400930
PolyPro 20m 400945 400940

* other filters available on request 

 

High Capacity, High Efficiency Particle Filter

MV MULTI-TRAP is now offered in a new configuration featuring a single high capacity, high efficiency particle filter for processes that generate large amounts of particulate. This large filter, 13” height x 14” diameter, is made with high temperature pleated polyester material, offering 40 sq. ft. of surface area with a particle retention rating of 60 grams per sq. ft. The filters are available in a 25 and 100 micron ratings, offering a 99% particle efficiency rating. The combination of this large surface area and particle retention rating makes it ideally suited for protecting vacuum pumps used on LPCVD, PECVD, and ALD in semiconductor wafer fabs.

The MULTI-TRAP is 16” diameter with a conductance rating of greater than 2000 CFM @ 1 torr, all 304 stainless steel construction, with ISO-160 ports, available in a right angle and straight-through configuration. Optional cooling accessory, filter shield, and retrofit kit for existing installations are also available. Trap stacking modules can be added to greatly increase the capacity.

 

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Vacuum Inlet Trap
Exploded view of multi-trap

High Capacity Particle Filter