Articles

Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage trap is a reactor that deposits silicon nitride (Si3N4) onto silicon

Throughput Increases in Silicon Dioxide Deposition Systems​ Another common application for a multiple-stage trap is a CVD (chemical vapor deposition) process to deposit silicon dioxide

Multi-Stage Traps Clean Up Vacuum Systems Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage trap is a reactor that

Multi-Stage Traps Clean Up Vacuum By Herbert W. Gatti and Lise C.H. Laurin The costs involved in maintaining vacuum processes in a manufacturing facility can