Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage vacuum pump trap is a reactor that deposits silicon nitride (Si3N4)
Industry Links and Additional Information
Our regular customers know that our staff is always happy to share information and direct them to sources for vacuum products and services that we do not supply. In that same spirit, we hope to use this “resources” section of our website to provide access to helpful information related to general vacuum and vacuum processing applications.
Conversion Tables (PDF File)
Need to convert Pascal to Torr? Liters per minute to CFM? These handy charts give the most common conversions for absolute pressure and flow rates.
Our list of links directs you to non commercial trade organizations and societies that provide technical information as well as product sourcing information.
Throughput Increases in Silicon Dioxide Deposition Systems Another common application for a multiple-stage vacuum pump trap is a CVD (chemical vapor deposition) process to deposit