Articles

Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage vacuum pump trap is a reactor that deposits silicon nitride (Si3N4) onto silicon wafers in an LPCVD (low pressure chemical vapor deposition) process. The deposition of silicon nitride from the thermal reaction of dichlorosilane (SiH2Cl2) and ammonia (NH3) creates large amounts … Read more

Throughput Increases in Silicon Dioxide Deposition Systems​ Another common application for a multiple-stage vacuum pump trap is a CVD (chemical vapor deposition) process to deposit silicon dioxide onto silicon wafers. Silicon dioxide dust wears at a vacuum system, reducing pumping efficiency. Liquid silicon dioxide sources, such as tetraethylorthosilicate (TEOS), can recondense in the vacuum lines, … Read more

Multi-Stage Traps Clean Up Vacuum Systems Cleaning up an LPCVD Silicon Nitride Deposition System A typical application for a multiple-stage vacuum pump trap is a reactor that deposits silicon nitride (Si3N4) onto silicon wafers in an LPCVD (low pressure chemical vapor deposition) process. The deposition of silicon nitride from the thermal reaction of dichlorosilane (SiH2Cl2) … Read more

Multi-Stage Traps Clean Up Vacuum By Herbert W. Gatti and Lise C.H. Laurin The costs involved in maintaining vacuum processes in a manufacturing facility can often exceed most other maintenance costs. Pump failures, clogged or sticking valves, and clogged exhaust lines are some of the catastrophic failures that cause lost yield, high downtimes, and high … Read more